Scimago Journal & Country Rank

Journal of Vacuum Science and Technology B

Country

United States

Universities and research institutions in United States
Media Ranking in United States

Subject Area and Category

Publisher

AVS Science and Technology Society

H-Index

124

Publication type

Journals

ISSN

21662746, 21662754

Coverage

1991-1992, 2009-2023

Information

Homepage

How to publish in this journal

aydil@nyu.edu

Scope

JVSTB is devoted to publishing reports of original research, letters, and review articles on microelectronics and nanotechnology. The scope includes, but is not limited to, the following topics: Compound semiconductor electronics and optoelectronics; Dielectrics in micro- and nanoelectronics; Graphene, carbon nanotubes, and fullerenes: materials & devices; Group IV semiconductor microelectronics; Lithography; Microelectromechanical and nanoelectromechanical systems and devices (MEMS & NEMS); Nanometer science and nanotechnology; Nanostructured materials and devices including nanowires, nanoparticles and quantum dots, and organic and molecular electronics; Photovoltaics, batteries, and other devices for energy conversion and storage; Plasmonics; Spintronics and magnetic devices; Vacuum Measurement and Technology. Join the conversation about this journal
Quartiles

The set of journals have been ranked according to their SJR and divided into four equal groups, four quartiles. Q1 (green) comprises the quarter of the journals with the highest values, Q2 (yellow) the second highest values, Q3 (orange) the third highest values and Q4 (red) the lowest values.

CategoryYearQuartile
Condensed Matter Physics1999Q1
Condensed Matter Physics2000Q1
Condensed Matter Physics2001Q1
Condensed Matter Physics2002Q1
Condensed Matter Physics2003Q1
Condensed Matter Physics2004Q1
Condensed Matter Physics2005Q1
Condensed Matter Physics2006Q1
Condensed Matter Physics2007Q1
Condensed Matter Physics2008Q2
Condensed Matter Physics2009Q2
Condensed Matter Physics2010Q2
Condensed Matter Physics2011Q2
Condensed Matter Physics2012Q2
Condensed Matter Physics2013Q2
Condensed Matter Physics2014Q2
Condensed Matter Physics2015Q2
Condensed Matter Physics2016Q2
Condensed Matter Physics2017Q2
Condensed Matter Physics2018Q2
Condensed Matter Physics2019Q3
Condensed Matter Physics2020Q3
Condensed Matter Physics2021Q3
Condensed Matter Physics2022Q3
Condensed Matter Physics2023Q3
Electrical and Electronic Engineering1999Q1
Electrical and Electronic Engineering2000Q1
Electrical and Electronic Engineering2001Q1
Electrical and Electronic Engineering2002Q1
Electrical and Electronic Engineering2003Q1
Electrical and Electronic Engineering2004Q1
Electrical and Electronic Engineering2005Q1
Electrical and Electronic Engineering2006Q1
Electrical and Electronic Engineering2007Q1
Electrical and Electronic Engineering2008Q1
Electrical and Electronic Engineering2009Q1
Electrical and Electronic Engineering2010Q1
Electrical and Electronic Engineering2011Q1
Electrical and Electronic Engineering2012Q1
Electrical and Electronic Engineering2013Q2
Electrical and Electronic Engineering2014Q2
Electrical and Electronic Engineering2015Q2
Electrical and Electronic Engineering2016Q2
Electrical and Electronic Engineering2017Q2
Electrical and Electronic Engineering2018Q2
Electrical and Electronic Engineering2019Q2
Electrical and Electronic Engineering2020Q2
Electrical and Electronic Engineering2021Q2
Electrical and Electronic Engineering2022Q3
Electrical and Electronic Engineering2023Q3
Electronic, Optical and Magnetic Materials1999Q1
Electronic, Optical and Magnetic Materials2000Q1
Electronic, Optical and Magnetic Materials2001Q1
Electronic, Optical and Magnetic Materials2002Q1
Electronic, Optical and Magnetic Materials2003Q1
Electronic, Optical and Magnetic Materials2004Q1
Electronic, Optical and Magnetic Materials2005Q1
Electronic, Optical and Magnetic Materials2006Q1
Electronic, Optical and Magnetic Materials2007Q1
Electronic, Optical and Magnetic Materials2008Q1
Electronic, Optical and Magnetic Materials2009Q1
Electronic, Optical and Magnetic Materials2010Q2
Electronic, Optical and Magnetic Materials2011Q2
Electronic, Optical and Magnetic Materials2012Q2
Electronic, Optical and Magnetic Materials2013Q2
Electronic, Optical and Magnetic Materials2014Q2
Electronic, Optical and Magnetic Materials2015Q2
Electronic, Optical and Magnetic Materials2016Q2
Electronic, Optical and Magnetic Materials2017Q2
Electronic, Optical and Magnetic Materials2018Q2
Electronic, Optical and Magnetic Materials2019Q3
Electronic, Optical and Magnetic Materials2020Q3
Electronic, Optical and Magnetic Materials2021Q3
Electronic, Optical and Magnetic Materials2022Q3
Electronic, Optical and Magnetic Materials2023Q3
Instrumentation1999Q1
Instrumentation2000Q1
Instrumentation2001Q1
Instrumentation2002Q1
Instrumentation2003Q1
Instrumentation2004Q1
Instrumentation2005Q1
Instrumentation2006Q1
Instrumentation2007Q1
Instrumentation2008Q1
Instrumentation2009Q1
Instrumentation2010Q1
Instrumentation2011Q1
Instrumentation2012Q1
Instrumentation2013Q2
Instrumentation2014Q2
Instrumentation2015Q2
Instrumentation2016Q2
Instrumentation2017Q2
Instrumentation2018Q2
Instrumentation2019Q2
Instrumentation2020Q2
Instrumentation2021Q3
Instrumentation2022Q3
Instrumentation2023Q3
Materials Chemistry1999Q1
Materials Chemistry2000Q1
Materials Chemistry2001Q1
Materials Chemistry2002Q1
Materials Chemistry2003Q1
Materials Chemistry2004Q1
Materials Chemistry2005Q1
Materials Chemistry2006Q1
Materials Chemistry2007Q1
Materials Chemistry2008Q1
Materials Chemistry2009Q1
Materials Chemistry2010Q1
Materials Chemistry2011Q1
Materials Chemistry2012Q2
Materials Chemistry2013Q2
Materials Chemistry2014Q2
Materials Chemistry2015Q2
Materials Chemistry2016Q2
Materials Chemistry2017Q2
Materials Chemistry2018Q2
Materials Chemistry2019Q2
Materials Chemistry2020Q2
Materials Chemistry2021Q2
Materials Chemistry2022Q2
Materials Chemistry2023Q3
Process Chemistry and Technology1999Q1
Process Chemistry and Technology2000Q1
Process Chemistry and Technology2001Q1
Process Chemistry and Technology2002Q1
Process Chemistry and Technology2003Q1
Process Chemistry and Technology2004Q1
Process Chemistry and Technology2005Q1
Process Chemistry and Technology2006Q1
Process Chemistry and Technology2007Q1
Process Chemistry and Technology2008Q1
Process Chemistry and Technology2009Q1
Process Chemistry and Technology2010Q1
Process Chemistry and Technology2011Q2
Process Chemistry and Technology2012Q2
Process Chemistry and Technology2013Q2
Process Chemistry and Technology2014Q2
Process Chemistry and Technology2015Q2
Process Chemistry and Technology2016Q2
Process Chemistry and Technology2017Q2
Process Chemistry and Technology2018Q2
Process Chemistry and Technology2019Q2
Process Chemistry and Technology2020Q3
Process Chemistry and Technology2021Q3
Process Chemistry and Technology2022Q3
Process Chemistry and Technology2023Q3
Surfaces, Coatings and Films1999Q1
Surfaces, Coatings and Films2000Q1
Surfaces, Coatings and Films2001Q1
Surfaces, Coatings and Films2002Q1
Surfaces, Coatings and Films2003Q1
Surfaces, Coatings and Films2004Q1
Surfaces, Coatings and Films2005Q1
Surfaces, Coatings and Films2006Q1
Surfaces, Coatings and Films2007Q1
Surfaces, Coatings and Films2008Q1
Surfaces, Coatings and Films2009Q1
Surfaces, Coatings and Films2010Q1
Surfaces, Coatings and Films2011Q1
Surfaces, Coatings and Films2012Q2
Surfaces, Coatings and Films2013Q2
Surfaces, Coatings and Films2014Q2
Surfaces, Coatings and Films2015Q2
Surfaces, Coatings and Films2016Q2
Surfaces, Coatings and Films2017Q2
Surfaces, Coatings and Films2018Q2
Surfaces, Coatings and Films2019Q2
Surfaces, Coatings and Films2020Q2
Surfaces, Coatings and Films2021Q2
Surfaces, Coatings and Films2022Q2
Surfaces, Coatings and Films2023Q3
SJR

The SJR is a size-independent prestige indicator that ranks journals by their 'average prestige per article'. It is based on the idea that 'all citations are not created equal'. SJR is a measure of scientific influence of journals that accounts for both the number of citations received by a journal and the importance or prestige of the journals where such citations come from It measures the scientific influence of the average article in a journal, it expresses how central to the global scientific discussion an average article of the journal is.

YearSJR
19991.723
20001.588
20011.608
20021.503
20031.495
20041.322
20051.248
20061.285
20071.267
20080.998
20090.929
20100.900
20110.868
20120.691
20130.550
20140.509
20150.533
20160.595
20170.467
20180.465
20190.403
20200.429
20210.420
20220.400
20230.328
Total Documents

Evolution of the number of published documents. All types of documents are considered, including citable and non citable documents.

YearDocuments
1999633
2000675
2001537
2002546
2003572
2004667
2005587
2006599
2007498
2008476
2009635
2010534
2011447
2012288
2013328
2014279
2015256
2016292
2017247
2018231
2019218
2020197
2021150
2022161
2023202
Citations per document

This indicator counts the number of citations received by documents from a journal and divides them by the total number of documents published in that journal. The chart shows the evolution of the average number of times documents published in a journal in the past two, three and four years have been cited in the current year. The two years line is equivalent to journal impact factor ™ (Thomson Reuters) metric.

Cites per documentYearValue
Cites / Doc. (4 years)19991.584
Cites / Doc. (4 years)20001.487
Cites / Doc. (4 years)20011.684
Cites / Doc. (4 years)20021.673
Cites / Doc. (4 years)20031.811
Cites / Doc. (4 years)20041.826
Cites / Doc. (4 years)20051.875
Cites / Doc. (4 years)20061.933
Cites / Doc. (4 years)20071.803
Cites / Doc. (4 years)20081.670
Cites / Doc. (4 years)20091.564
Cites / Doc. (4 years)20101.551
Cites / Doc. (4 years)20111.632
Cites / Doc. (4 years)20121.420
Cites / Doc. (4 years)20131.372
Cites / Doc. (4 years)20141.365
Cites / Doc. (4 years)20151.378
Cites / Doc. (4 years)20161.566
Cites / Doc. (4 years)20171.496
Cites / Doc. (4 years)20181.388
Cites / Doc. (4 years)20191.413
Cites / Doc. (4 years)20201.469
Cites / Doc. (4 years)20211.609
Cites / Doc. (4 years)20221.496
Cites / Doc. (4 years)20231.412
Cites / Doc. (3 years)19991.584
Cites / Doc. (3 years)20001.493
Cites / Doc. (3 years)20011.717
Cites / Doc. (3 years)20021.754
Cites / Doc. (3 years)20031.865
Cites / Doc. (3 years)20041.805
Cites / Doc. (3 years)20051.896
Cites / Doc. (3 years)20061.972
Cites / Doc. (3 years)20071.771
Cites / Doc. (3 years)20081.625
Cites / Doc. (3 years)20091.655
Cites / Doc. (3 years)20101.595
Cites / Doc. (3 years)20111.619
Cites / Doc. (3 years)20121.360
Cites / Doc. (3 years)20131.429
Cites / Doc. (3 years)20141.462
Cites / Doc. (3 years)20151.550
Cites / Doc. (3 years)20161.648
Cites / Doc. (3 years)20171.572
Cites / Doc. (3 years)20181.357
Cites / Doc. (3 years)20191.532
Cites / Doc. (3 years)20201.555
Cites / Doc. (3 years)20211.656
Cites / Doc. (3 years)20221.558
Cites / Doc. (3 years)20231.417
Cites / Doc. (2 years)19991.480
Cites / Doc. (2 years)20001.520
Cites / Doc. (2 years)20011.732
Cites / Doc. (2 years)20021.723
Cites / Doc. (2 years)20031.755
Cites / Doc. (2 years)20041.754
Cites / Doc. (2 years)20051.855
Cites / Doc. (2 years)20061.897
Cites / Doc. (2 years)20071.646
Cites / Doc. (2 years)20081.587
Cites / Doc. (2 years)20091.719
Cites / Doc. (2 years)20101.494
Cites / Doc. (2 years)20111.533
Cites / Doc. (2 years)20121.352
Cites / Doc. (2 years)20131.439
Cites / Doc. (2 years)20141.619
Cites / Doc. (2 years)20151.586
Cites / Doc. (2 years)20161.761
Cites / Doc. (2 years)20171.482
Cites / Doc. (2 years)20181.458
Cites / Doc. (2 years)20191.697
Cites / Doc. (2 years)20201.543
Cites / Doc. (2 years)20211.643
Cites / Doc. (2 years)20221.530
Cites / Doc. (2 years)20231.395
Total Cites 
Self-Cites

Evolution of the total number of citations and journal's self-citations received by a journal's published documents during the three previous years.
Journal Self-citation is defined as the number of citation from a journal citing article to articles published by the same journal.

CitesYearValue
Self Cites1999496
Self Cites2000543
Self Cites2001474
Self Cites2002402
Self Cites2003443
Self Cites2004430
Self Cites2005384
Self Cites2006420
Self Cites2007400
Self Cites2008372
Self Cites2009307
Self Cites2010327
Self Cites2011292
Self Cites2012175
Self Cites2013191
Self Cites2014146
Self Cites201592
Self Cites2016117
Self Cites201791
Self Cites2018100
Self Cites201973
Self Cites202074
Self Cites202158
Self Cites202262
Self Cites202376
Total Cites19993291
Total Cites20002842
Total Cites20013507
Total Cites20023237
Total Cites20033279
Total Cites20042988
Total Cites20053385
Total Cites20063600
Total Cites20073281
Total Cites20082737
Total Cites20092604
Total Cites20102567
Total Cites20112663
Total Cites20122197
Total Cites20131814
Total Cites20141554
Total Cites20151387
Total Cites20161422
Total Cites20171300
Total Cites20181079
Total Cites20191180
Total Cites20201082
Total Cites20211070
Total Cites2022880
Total Cites2023720
External Cites per Doc 
Cites per Doc

Evolution of the number of total citation per document and external citation per document (i.e. journal self-citations removed) received by a journal's published documents during the three previous years. External citations are calculated by subtracting the number of self-citations from the total number of citations received by the journal’s documents.

CitesYearValue
External Cites per document19991.345
External Cites per document20001.208
External Cites per document20011.485
External Cites per document20021.537
External Cites per document20031.613
External Cites per document20041.546
External Cites per document20051.681
External Cites per document20061.742
External Cites per document20071.555
External Cites per document20081.404
External Cites per document20091.460
External Cites per document20101.392
External Cites per document20111.441
External Cites per document20121.251
External Cites per document20131.279
External Cites per document20141.325
External Cites per document20151.447
External Cites per document20161.512
External Cites per document20171.462
External Cites per document20181.231
External Cites per document20191.438
External Cites per document20201.448
External Cites per document20211.567
External Cites per document20221.448
External Cites per document20231.268
Cites per document19991.584
Cites per document20001.493
Cites per document20011.717
Cites per document20021.754
Cites per document20031.865
Cites per document20041.805
Cites per document20051.896
Cites per document20061.972
Cites per document20071.771
Cites per document20081.625
Cites per document20091.655
Cites per document20101.595
Cites per document20111.619
Cites per document20121.360
Cites per document20131.429
Cites per document20141.462
Cites per document20151.550
Cites per document20161.648
Cites per document20171.572
Cites per document20181.357
Cites per document20191.532
Cites per document20201.555
Cites per document20211.656
Cites per document20221.558
Cites per document20231.417
% International Collaboration

International Collaboration accounts for the articles that have been produced by researchers from several countries. The chart shows the ratio of a journal's documents signed by researchers from more than one country; that is including more than one country address.

YearInternational Collaboration
19994.42
200017.04
200117.32
200213.37
200315.56
200416.49
200514.14
200620.03
200717.07
200820.17
200919.21
201023.22
201125.28
201220.49
201318.60
201420.79
201519.14
201622.26
201725.51
201821.65
201927.98
202024.87
202116.67
202211.80
202314.85
Citable documents 
Non-citable documents

Not every article in a journal is considered primary research and therefore "citable", this chart shows the ratio of a journal's articles including substantial research (research articles, conference papers and reviews) in three year windows vs. those documents other than research articles, reviews and conference papers.

DocumentsYearValue
Non-citable documents19990
Non-citable documents20000
Non-citable documents20011
Non-citable documents20025
Non-citable documents200312
Non-citable documents200414
Non-citable documents200510
Non-citable documents20067
Non-citable documents20074
Non-citable documents20085
Non-citable documents20092
Non-citable documents201010
Non-citable documents201115
Non-citable documents201215
Non-citable documents20137
Non-citable documents20141
Non-citable documents20150
Non-citable documents20161
Non-citable documents20171
Non-citable documents20183
Non-citable documents20193
Non-citable documents20203
Non-citable documents20211
Non-citable documents20221
Non-citable documents20231
Citable documents19992078
Citable documents20001903
Citable documents20012042
Citable documents20021840
Citable documents20031746
Citable documents20041641
Citable documents20051775
Citable documents20061819
Citable documents20071849
Citable documents20081679
Citable documents20091571
Citable documents20101599
Citable documents20111630
Citable documents20121601
Citable documents20131262
Citable documents20141062
Citable documents2015895
Citable documents2016862
Citable documents2017826
Citable documents2018792
Citable documents2019767
Citable documents2020693
Citable documents2021645
Citable documents2022564
Citable documents2023507
Cited documents 
Uncited documents

Ratio of a journal's items, grouped in three years windows, that have been cited at least once vs. those not cited during the following year.

DocumentsYearValue
Uncited documents1999842
Uncited documents2000830
Uncited documents2001792
Uncited documents2002746
Uncited documents2003679
Uncited documents2004635
Uncited documents2005663
Uncited documents2006634
Uncited documents2007695
Uncited documents2008656
Uncited documents2009611
Uncited documents2010634
Uncited documents2011634
Uncited documents2012684
Uncited documents2013512
Uncited documents2014413
Uncited documents2015329
Uncited documents2016331
Uncited documents2017314
Uncited documents2018334
Uncited documents2019320
Uncited documents2020273
Uncited documents2021233
Uncited documents2022210
Uncited documents2023202
Cited documents19991236
Cited documents20001073
Cited documents20011251
Cited documents20021099
Cited documents20031079
Cited documents20041020
Cited documents20051122
Cited documents20061192
Cited documents20071158
Cited documents20081028
Cited documents2009962
Cited documents2010975
Cited documents20111011
Cited documents2012932
Cited documents2013757
Cited documents2014650
Cited documents2015566
Cited documents2016532
Cited documents2017513
Cited documents2018461
Cited documents2019450
Cited documents2020423
Cited documents2021413
Cited documents2022355
Cited documents2023306
% Female Authors

Evolution of the percentage of female authors.

YearFemale Percent
199912.24
200015.80
200115.64
200214.57
200316.12
200414.97
200516.08
200615.88
200717.36
200816.71
200918.52
201017.37
201118.15
201218.29
201318.47
201420.15
201518.08
201619.73
201721.11
201820.36
201919.81
202018.76
202119.02
202220.98
202321.78
Documents cited by public policy (Overton)

Evolution of the number of documents cited by public policy documents according to Overton database.

DocumentsYearValue
Overton19990
Overton20002
Overton20011
Overton20021
Overton20031
Overton20040
Overton20051
Overton20062
Overton20071
Overton20082
Overton20090
Overton20100
Overton20111
Overton20121
Overton20131
Overton20141
Overton20151
Overton20160
Overton20171
Overton20183
Overton20191
Overton20200
Overton20211
Overton20220
Overton20230
Documents related to SDGs (UN)

Evoution of the number of documents related to Sustainable Development Goals defined by United Nations. Available from 2018 onwards.

DocumentsYearValue
SDG201821
SDG201920
SDG202015
SDG202122
SDG202221
SDG202335
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